1. Heating ---- By High Frequency
Induction heating and Turning-on-electricity heating device
|
1) Temperature Range |
from
RT to 1450 deg.C (sensor [R]TC) |
|
2) Heating Rate * |
100 deg.C / sec |
|
3) Temp Distribution |
+/- 10 deg.C (on Uniformity
area) |
|
4) Control Accuracy |
+/- deg.C (only Controller) |
|
2. Cooling ---- by Cooling Gas Spray
from Nozzles
|
1) Temperature Range |
from
1000 deg.C to300 deg.C (sensor
[R] TC) |
|
2) Attainable Vacuum |
Gas Max 200 deg.C / sec
(He Gas 0.7MPa) |
|
3) Time Distribution |
+/- 20% (to the set
cooling time) |
|
3. Atmosphere Making ---- by Exhaust
Unit Atmosphere Making Circuit
|
1) Configuration |
Vacuuming Rate Rotary
Pump |
162(50Hz) / 193(60Hz)
L/min |
| @ |
Turbo Molecular Pump |
4B 220L / 5min |
|
2) Attainable Vacuum |
1.3~10-2 Pa
order |
|
3) Atmospheric Gas |
Inart Gas |
|
4. Computer System (Hardware and Software)
|
1) Configuration |
Computer Unit,
LCD-Display
,Inkjet-Printer |
|
2) CPU |
Pentium , 2.4GHz, 512MB |
|
3) Media |
HD: 120GB, FD:3.5",
CD-R/RW/DVD-ROM |
|
4)
Operating System |
Windows-XP |
|
5) Application system |
FDCPRG |
|
